Ion sensor, ion sensor manufacturing method, and field asymmetric ion mobility spectrometry system
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United States of America Patent
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Mar 9, 2021
Grant Date -
Jul 4, 2019
app pub date -
Oct 18, 2018
filing date -
Jan 4, 2018
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Abstract
An ion sensor, an ion sensor manufacturing method, and a field asymmetric ion mobility spectrometry (FAIMS) system. The ion sensor includes an ion filter including a first electrode and a second electrode facing each other, an ion sensing electrode with which an ion that has passed through the ion filter collides, and an insulator to electrically insulate the ion sensing electrode from the first electrode and the second electrode. The method includes forming a first slit on an active layer of an at least one SOI substrate, the at least one SOI substrate including a base layer, an insulating layer on the base layer, and the active layer on the insulating layer, dividing the active layer into two, forming a second slit through the base layer, the second slit overlapping with the first slit in a planar view, and forming a third slit through the insulating layer.
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