Micro or nanomechanical particle detection device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10794813
APP PUB NO 20190204205A1
SERIAL NO

16237817

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Abstract

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Particle detection device comprising a support, a platform for receiving particles, four beams suspending the platform from the support, such that the platform can be made to vibrate, means for making said platform vibrate at a resonance frequency, means for detecting the displacement of the platform in a direction of displacement. Each beam has a length l, a width L and a thickness e and the platform has a dimension in the direction of displacement of the platform and in which in a device with out of plane mode l≥10×L and the dimension of each beam in the direction of displacement of the platform is at least 10 times smaller than the dimension of the platform in the direction of displacement.

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Patent Owner(s)

Patent OwnerAddress
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESPARIS FRANCE PARIS PARIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hentz, Sebastien Seyssinet-Pariset, FR 25 132
Sansa, Perna Marc Castelar del Valles, ES 12 3

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