Material Property Measurements Using Multiple Frequency Atomic Force Microscopy
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United States of America Patent
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Jun 27, 2019
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Feb 26, 2019
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Feb 26, 2019
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Abstract
Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.
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