Corrosion-Resistant Temperature Sensor Probe
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United States of America Patent
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Issued Date -
Jun 20, 2019
app pub date -
Dec 14, 2017
filing date -
Dec 14, 2017
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Abstract
A temperature sensor probe having a shaft is described. The shaft is made from a material that is corrosion resistant to plasma and remnants of a plasma process. The shaft extends over a portion of a metal layer, which forms a tip of the temperature sensor probe. The shaft further extends over a sleeve of the temperature sensor probe, a portion of a fiber optic medium of the temperature sensor probe and a portion of the fiber bundle housing of the temperature sensor probe. The material of the shaft increases a number of active processing hours for which the shaft is used within a plasma chamber during the plasma process.
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