Composition for surface treatment, and method for surface treatment using the same

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United States of America Patent

PATENT NO 10876073
APP PUB NO 20190177656A1
SERIAL NO

16324090

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Abstract

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The present invention is to provide a means with which foreign matters remaining on a surface of a polished object to be polished can be sufficiently removed. The present invention relates to a composition for surface treatment for a polished object to be polished, including: a (co)polymer containing a structural unit A having a phosphonic acid group and a divalent (poly)oxyhydrocarbon group or a salt thereof; and water, wherein a content of the structural units A exceeds 50% by mole relative to the total structural units forming the (co)polymer.

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Patent Owner(s)

Patent OwnerAddress
FUJIMI INCORPORATED1-1 CHIRYO 2-CHOME NISHIBIWAJIMA-CHO KIYOSU-SHI AICHI 4528502

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishida, Yasuto Aichi, JP 21 59

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