REGENERATIVE ELECTROLESS ETCHING

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United States of America Patent

APP PUB NO 20190169766A1
SERIAL NO

16173800

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A regenerative electroless etching process produces nanostructured semiconductors in which an oxidant (Ox1) is used as a catalytic agent to facilitate reaction between a semiconductor and a second oxidant (Ox2) that would be unreactive (or slowly reactive compared to Ox1) in the primary reaction. Ox2 is used to regenerate Ox1, which can initiate etching by injecting holes into the semiconductor valence band. The extent of reaction is controlled by the amount of Ox2 added; the reaction rate, by the injection rate of Ox2. This general strategy is demonstrated specifically to produce highly luminescent nanocrystalline porous, amorphous pillared, and hierarchical porous silicon from the reaction of V2O5 in HF(aq) as Ox1 and H2O2(aq) as Ox2 with a silicon-comprising substrate. The process can be performed on silicon-comprising substrates of arbitrary size and shape including powders, reclaimed shards, wafers, pillared silicon, porous silicon, and silicon nanowires. Luminescence is tuned by adjusting etching conditions.

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Patent Owner(s)

Patent OwnerAddress
RAM NANOTECH INCORPORATED26 ASHLAWN CIRCLE MALVERN PA 19355-1133

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kolasinski, Kurt W West Chester, US 3 1
Makila, Ermei Turku, FI 1 1
Salonen, Jarno Rusko, FI 1 1

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