OPTICAL ELEMENT, OPTICAL ASSEMBLY AND PRODUCTION METHOD

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United States of America Patent

APP PUB NO 20190121240A1
SERIAL NO

16223624

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An optical element for transmitting radiation includes: a first surface region surrounding an optically used area of the optical element; and a second surface region that adjoins the first surface region. A circumferential edge is formed between the first and second surface regions. The optical element further includes a one-piece film which covers the first surface region, the edge and the second surface region. The film includes a hydrophobic material at least on its side facing away from the first and the second surface regions. An optical assembly includes at least one such optical element. A method produces such an optical element.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHRUDOLF-EBER-STRASSE 2 73447 OBERKOCHEN 73447

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Petasch, Thomas Aalen, DE 24 150
Pilz, Roland Aalen, DE 2 5

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