Microelectromechanical system (MEMS) devices
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United States of America Patent
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Apr 25, 2019
app pub date -
Jul 13, 2016
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Jul 13, 2016
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Abstract
One example provides a microelectromechanical systems (MEMS) device that includes a number of silicon die over-molded with an overmold material, a number of active areas formed on the silicon die, the active areas including at least one sensor to sense a number of attributes of a fluid introduced to the at least one sensor, and a fan-out layer coupled to the silicon die, the fan-out layer including a number of fluid channels formed therein that interface with active areas of the silicon die and allow the fluid to flow to the at least one sensor.
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