Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out

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United States of America Patent

PATENT NO 10788748
APP PUB NO 20190107776A1
SERIAL NO

16197658

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Abstract

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The invention relates to a method and an appliance for predicting the imaging result obtained with a mask when a lithography process is carried out, wherein the mask comprises mask structures to be imaged and the mask is destined to be illuminated in a lithography process in a projection exposure apparatus with a predetermined illumination setting for exposing a wafer comprising a photoresist. In accordance with one aspect of the invention, a method according to the invention comprises the following steps: measuring at least one intensity distribution obtained for the mask in the case of an illumination with illumination light in accordance with the illumination setting in a mask inspection apparatus using a sensor arrangement, ascertaining an electric field resulting from the interaction of the illumination light with the mask structures, both in respect of amplitude and in respect of phase, by way of this intensity measurement, and estimating an intensity distribution obtained in the photoresist when the lithography process is carried out on the basis of a mathematical simulation (forward calculation), in which the electric field ascertained is propagated in a layer system comprising at least the photoresist.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHRUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Buttgereit, Ute Jena, DE 13 238
Husemann, Christoph Jena, DE 28 86
Seitz, Holger Jena, DE 15 78
Thaler, Thomas Jena, DE 17 1801
Top-Diallo, Mame Kouna Veldhoven, NL 1 0
Trautzsch, Thomas Jena, DE 12 320

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