GAS INJECTOR WITH BAFFLE
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United States of America Patent
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Issued Date -
Apr 11, 2019
app pub date -
Aug 29, 2018
filing date -
Oct 9, 2017
priority date (Note) -
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Abstract
Gas injectors for providing uniform flow of fluid are provided herein. The gas injector includes a plenum body. The plenum body includes a recess, a protrusion adjacent to the recess and extending laterally away from the plenum body, and a plurality of nozzles extending laterally from an exterior surface of the plenum body. The plenum body has a plurality of holes in an exterior wall of the plenum body. Each nozzle is in fluid communication with an interior volume of the plenum body. By directing the flow of fluid, the gas injector provides for a uniform deposition.
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