Method for Producing Group III Nitride Laminate
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United States of America Patent
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Apr 4, 2019
app pub date -
Mar 15, 2017
filing date -
Mar 15, 2017
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Abstract
A method for producing a group III nitride laminate by growing a layer containing a group III nitride single crystal represented by AlXInYGaZN, where X, Y, and Z in the composition formula satisfy relation of X+Y+Z=1.0, 0.8≤X<1.0, 0.0≤Y<0.2, and 0.0
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