System, computer program product, and method for dissipation of an electrical charge

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United States of America Patent

PATENT NO 10716197
APP PUB NO 20190090335A1
SERIAL NO

15708974

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Abstract

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A computer program product and a method for dissipation of an electrical charge stored in a region of an object. The method may include (a) sensing, by at least one sensor, an electrical charging status of the region of the object, while the object is located within a vacuum chamber and while a gaseous pressure within the vacuum chamber is below a certain vacuum pressure threshold; and (b) performing, based on the charging status of the given region, an electrical charge dissipation process that comprises increasing the gaseous pressure within the vacuum chamber to be within a given gaseous pressure range that facilitates a dissipation, by breakdown, of the electrical charge stored in the region of the object to the vacuum chamber.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ISRAEL LTD9 OPPENHEIMER STREET PARK RABIN REHOVOT 7670109

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Eytan, Guy Kidron, IL 18 68
Karabekov, Albert Ashdod, IL 6 14
Nackash, Samuel Ives Nes Ziona, IL 4 1
Weisz, Emil Modiin, IL 10 2

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