POLISHING COMPOSITION FOR OBJECT TO BE POLISHED HAVING METAL-CONTAINING LAYER
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Mar 21, 2019
app pub date -
Mar 10, 2017
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Mar 10, 2017
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Abstract
The present invention provides a polishing composition for an object to be polished having a metal-containing layer, by which sufficient flattening can be achieved. The present invention is a polishing composition used for polishing an object to be polished having a metal-containing layer, the polishing composition including: abrasive grains; an acid; an oxidizer; and a dispersing medium, wherein an acid dissociation constant (pKa) of the acid is higher than a pH of the composition.
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