CONVEYING PAD, CONVEYING APPARATUS USING THE CONVEYING PAD, AND CONVEYING METHOD
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United States of America Patent
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Issued Date -
Mar 21, 2019
app pub date -
Mar 8, 2016
filing date -
Mar 8, 2016
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Abstract
A conveying pad, a conveying apparatus and a conveying method using the conveying pad, capable of exactly attracting and fixing an object placed on a part of a conveying surface or levitating the object, by virtue of an attracting force or levitating force of the conveying pad. The conveying pad is made of a porous substrate communicated with a large number of pores, and by depressurizing or pressurizing the back surface of the conveying pad, an object W placed on the front surface of the conveying pad is attracted or levitated, thus satisfying a relational equation between an area ratio a of the object covering the surface of the conveying pad and a conductance ratio β.
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