ULTRAVIOLET RADIATION APPARATUS
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United States of America Patent
Stats
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N/A
Issued Date -
Mar 14, 2019
app pub date -
Nov 9, 2017
filing date -
Nov 9, 2017
priority date (Note) -
Published
status (Latency Note)
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US Family Size
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Non-US Coverage
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Abstract
The present disclosure provides an ultraviolet (UV) radiation apparatus, where the UV radiation apparatus includes a chamber containing substrates, a sample stage supporting the substrates, UV lamps emitting UV light arranged opposite to the sample stage, and a mirror reflective structure arranged in the chamber. The sample stage is positioned at a top of the chamber or a bottom of the chamber. The mirror reflective structure includes protrusions or recesses that are orderly arranged; the protrusions or the recesses reflect the UV light along all directions and the UV light is irradiated on the mirror reflective structure.
First Claim
Other Claims data not available
Family
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| CN | B | CN107377533 | Sep 12, 2017 |
| WO | A1 | WO2019051975 | Nov 09, 2017 |
International Classification(s)
- 2017 Application Filing Year
- H01L Class
- 30754 Applications Filed
- 25260 Patents Issued To-Date
- 82.14 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 6 Age