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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO LTD	NO 9-2 TANGMING ROAD GONGMING STREET GUANGMING NEW DISTRICT SHENZHEN 518132

International Classification(s)

• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
• G21K:TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNET....
• B08B:CLEANING IN GENERAL; PREVENTION OF FOULING IN GENE....

• 2017 Application Filing Year
• H01L Class
• 30754 Applications Filed
• 25260 Patents Issued To-Date
• 82.14 % Issued To-Date

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
SHI, Ting	Shenzhen, Guangdong, CN	33	40
# of filed Patents : 33 Total Citations : 40

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• H01L Class

• 0 % this patent is cited more than
• 6 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Sep 14, 2026
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Sep 14, 2030

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2019/0080,812

ULTRAVIOLET RADIATION APPARATUS

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Abstract

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The present disclosure provides an ultraviolet (UV) radiation apparatus, where the UV radiation apparatus includes a chamber containing substrates, a sample stage supporting the substrates, UV lamps emitting UV light arranged opposite to the sample stage, and a mirror reflective structure arranged in the chamber. The sample stage is positioned at a top of the chamber or a bottom of the chamber. The mirror reflective structure includes protrusions or recesses that are orderly arranged; the protrusions or the recesses reflect the UV light along all directions and the UV light is irradiated on the mirror reflective structure.

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Description

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Claims

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