Micro flow measurement devices and devices with movable features
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United States of America Patent
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Aug 11, 2020
Grant Date -
Feb 7, 2019
app pub date -
Aug 2, 2018
filing date -
Aug 4, 2017
priority date (Note) -
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Abstract
Disclosed is a micro flow device including a body frame defining a chamber and having a first port and a second port into the chamber. A first membrane carrying a first electrode is disposed over a first face of the body frame and a second membrane carrying a second electrode is disposed over a second face of the body frame. An axle member is disposed in the chamber affixed to the first and second membrane and a wheel member is disposed in the chamber about the axle member and spaced from the axle element by a gap. An interrupter feature is formed on the wheel, with the interrupter feature causing a variation in capacitance between the first and second electrodes during rotation of the wheel. Also disclosed are techniques for providing freely rotating, sliding, moving, etc. features in devices fabricated by roll to roll processes.
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