LITHOGRAPHIC PROJECTION OBJECTIVE

United States of America Patent

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Issued Date
Jan 24, 2019
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Jul 30, 2018
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Jul 30, 2018

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Abstract

Projection objectives, such as projection objectives of lithography projection exposure apparatuses, as well as related systems, components and methods, such as methods of revising and/or repairing such objectives, are disclosed.

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Patent Owner(s)

Patent Owner	Address
CARL ZEISS SMT AG	RUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

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G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Bittner, Boris	Roth, DE	45	321
Haeussler, Jochen	Hermaringen, DE	4	9
Petasch, Thomas	Aalen, DE	24	150
Rogalsky, Olaf	Oberkochen, DE	9	53

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LITHOGRAPHIC PROJECTION OBJECTIVE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

16048549

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16048549

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