PLASMA DIAGNOSIS SYSTEM USING MULTIPLE-RECIPROCATING-PATH THOMPSON SCATTERING

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United States of America Patent

APP PUB NO 20190019584A1
SERIAL NO

16068268

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Abstract

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Provided is a plasma diagnosis system using multiple-reciprocating-path Thompson scattering. The plasma diagnosis system includes: alight source which supplies pulsed laser beams; an optical system which sequentially supplies a pulsed laser beam in a vertical polarization state and a pulsed laser beam in a horizontal polarization state; a collection optic system which measures a first collection signal scattered from the plasma when the pulsed laser beam in the vertical polarization state is focused and measures a second collection signal scattered from the plasma when the pulsed laser beam in the horizontal polarization state is focused; and a controller which measures a Thomson scattering signal for the plasma by using the first and second collection signals measured by the collection optic system, and the second collection signal is a background scattering noise signal.

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Patent Owner(s)

Patent OwnerAddress
INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANG UNIVERSITY35 BAEKBEOM-RO MAPO-GU SEOUL 121-742

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
AHN, Wha-Keun Andong-si, KR 4 1
CHO, Kyu Man Seoul, KR 4 1
PARK, June Gyu Seoul, KR 13 605
YOON, Seung Hyun Seoul, KR 63 451

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