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Abstract

An observation method using a compound microscope of an inverted optical microscope and an atomic force microscope includes scanning a cantilever so that a probe approaches a sample until surface layer information is acquired, observing the cantilever through the optical microscope to acquire shape information of the cantilever, moving an observation position of the optical microscope downward based on a length of the probe, performing fluorescence observation through the optical microscope, and scanning the cantilever to acquire the surface layer information. The probe approach, cantilever observation, and observation position movement are performed in order. The fluorescence observation is performed after the observation position movement. The surface layer information acquisition is performed after the probe approach.

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First Claim