Plasma source
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Nov 5, 2019
Grant Date -
Nov 29, 2018
app pub date -
Mar 15, 2018
filing date -
May 23, 2017
priority date (Note) -
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Abstract
A plasma source is provided. The plasma source includes a chamber body inside which plasma is generated, a first mirror magnet, a second mirror magnet, and a cusp magnet provided around the chamber body and spaced apart in a axial direction thereof, each comprising permanent magnets radially spaced apart from each other to form spaces between adjacent permanent magnets thereof; and a cooling medium flow passage provided in the spaces that passes a cooling medium for cooling the chamber body.
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