ANTI-TRANSIENT SHOWERHEAD

United States of America Patent

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Issued Date
Nov 29, 2018
app pub date
Jul 13, 2018
filing date
Jul 13, 2018

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Abstract

Showerheads for semiconductor processing equipment are disclosed that include various features designed to minimize or eliminate non-uniform gas delivery across the surface of a wafer due to gas flow transients within the showerhead.

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Patent Owner(s)

Patent Owner	Address
LAM RESEARCH CORPORATION	FREMONT CA

International Classification(s)

C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Hamilton, Shawn M	Boulder Creek, US	9	208
Smith, Colin F	Half Moon Bay, US	11	833
Sung, Edward	Milpitas, US	13	84

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ANTI-TRANSIENT SHOWERHEAD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

16035491

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16035491

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