ELECTRICAL FEEDS WITH LOW LOSS COATING MATERIALS FOR HIGH TEMPERATURE ELECTROSTATIC CHUCKS
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United States of America Patent
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Nov 22, 2018
app pub date -
Apr 27, 2018
filing date -
Apr 27, 2018
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Abstract
Implementations of the present disclosure include methods and apparatuses utilized to maintain or increase the electrical conductivity of an electrical feed through in a high temperature electrostatic chuck (ESC) within a processing chamber. In one implementation, the ESC has a dielectric body. The dielectric body has a chucking mesh and a metal mesh. A RF rod is formed from a first material, has an outer surface, and is attached to the chucking mesh. A conductive protective coating disposed on the outer surface of the RF rod.
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