Pressure Measurement at a Test Gas Inlet
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United States of America Patent
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Nov 15, 2018
app pub date -
Nov 10, 2016
filing date -
Nov 10, 2016
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Abstract
A device for measuring the pressure at the test gas inlet of a mass-spectrometric leak detector, wherein a mass spectrometer is connected to the inlet of a high vacuum pump having its outlet connected to the inlet of a pre-vacuum pump, wherein the inlet of the pre-vacuum pump is connected to the test gas inlet and wherein the inlet of the pre-vacuum pump and at least one intermediate inlet of the high vacuum pump are connected to each other by a connection line comprising a flow throttle.
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