Sensor element for a pressure sensor
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United States of America Patent
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Jun 2, 2020
Grant Date -
Nov 15, 2018
app pub date -
Oct 14, 2016
filing date -
Nov 18, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
A sensor element for a pressure sensor, includes a sensor membrane on which a defined number of piezoresistors are situated, the piezoresistors being configured in a circuit in such a way that, when there is a change in pressure an electrical change in voltage can be generated; at least two temperature measuring elements configured in relation to the sensor membrane in such a way that temperatures of the sensor membrane at positions of the piezoresistors can be measured using the temperature measuring elements, an electrical voltage present at the circuit of the piezoresistors due to a temperature gradient being capable of being compensated computationally using the measured temperatures.
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