METROLOGY DEVICES AND METHODS FOR INDEPENDENTLY CONTROLLING A PLURALITY OF SENSING PROBES
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United States of America Patent
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Issued Date -
Nov 8, 2018
app pub date -
Nov 3, 2016
filing date -
Nov 3, 2016
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Abstract
An example metrology device can include a plurality microelectromechanical (MEMS) devices, where each of the MEMS devices has a probe, and a plurality of flexure elements configured to independently displace the MEMS devices. Each of the flexure elements can be coupled to a respective MEMS device, and each of the flexure elements can be configured to displace the respective MEMS device in at least one direction.
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