PURIFICATION METHOD AND PURIFICATION APPARATUS FOR OFF-GAS
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United States of America Patent
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Oct 4, 2018
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Jun 4, 2018
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Jun 4, 2018
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The present invention relates to a purification method and a purification apparatus for off-gas. More specifically, the present invention relates to a purification method and a purification apparatus for off-gas, capable of lowering the concentration of hydrogen chloride and separating high-purity hydrogen from the off-gas, which is discharged after performing a polysilicon deposition process by a chemical vapor deposition reaction.
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