Linked micromechanical positioning apparatus for real-time testing and measurement
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United States of America Patent
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N/A
Issued Date -
Sep 27, 2018
app pub date -
Oct 13, 2015
filing date -
Oct 13, 2015
priority date (Note) -
Published
status (Latency Note)
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Non-US Coverage
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Abstract
The invention relates to a positioning device (120, 154), for example for testing, comprising a micromechanical positioning actuator (130) for causing movement of a probe (150, 151) with respect to a target (110), a positioning controller (145), the positioning controller (145) having an output coupled to the actuator (130) for controlling the movement, and the positioning controller (145) having a steering input (156) for receiving a steering signal to the positioning controller (145), and the positioning controller (145) arranged to control the movement based on the steering signal. The measurement device may have memory for storing positioning control instructions (300). The positioning controller (145) may be arranged to control said movement based on said steering signal and said positioning control instructions (300).
First Claim
Other Claims data not available
Family
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| EP | B1 | EP3362799 | Oct 13, 2015 |
| WO | A1 | WO2017064354 | Oct 13, 2015 |
| JP | A | JP2018538512 | Oct 13, 2015 |
International Classification(s)
- 2015 Application Filing Year
- G01N Class
- 11310 Applications Filed
- 8345 Patents Issued To-Date
- 73.79 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G01N Class
- 0 % this patent is cited more than
- 7 Age