A METHOD OF MAKING A COMPOSITE MULTILAYER STRUCTURE

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United States of America Patent

APP PUB NO 20180265363A1
SERIAL NO

15764521

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Abstract

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A method of making a multilayer structure is provided, comprising providing a substrate; providing a coating composition, comprising: a liquid carrier, a polycyclic aromatic additive and a MX/graphitic carbon precursor material having a formula (I); disposing the coating composition on the substrate to form a composite; optionally, baking the composite; annealing the composite under a forming gas atmosphere; whereby the composite is converted into an MX layer and a graphitic carbon layer disposed on the substrate providing the multilayer structure; wherein the MX layer is interposed between the substrate and the graphitic carbon layer in the multilayer structure.

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Patent Owner(s)

Patent OwnerAddress
ROHM AND HAAS ELECTRONIC MATERIALS LLC455 FOREST STREET MARLBOROUGH MA 01752

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Feng, Shaoguang Shanghai, CN 94 124
Li, Qiaowei Shanghai, CN 5 71
Pang, Qingqing Shanghai, CN 3 0
Trefonas,, III Peter Medway, US 102 645
Wang, Deyan Hudson, US 85 877
Wang, Xiuyan Changning, CN 17 8

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