Micromechanical actuator device and method for tilting a micromechanical actuator device
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United States of America Patent
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Sep 15, 2020
Grant Date -
Sep 6, 2018
app pub date -
Jul 18, 2016
filing date -
Sep 18, 2015
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Abstract
An actuator device and a method for tilting an actuator device. The method includes the steps: conducting electrical current through an electrical conduction device, which is guided via a tilting device of the actuator device, within a first magnetic field that is generated by a permanent magnet device of the actuator device, so that an actuator element of the tilting device is tilted along a first tilting axis as the result of a Lorentz force; and generating a second magnetic field by an electromagnet device of the actuator device in the area of the permanent magnet device, so that the tilting device is tilted along a second tilting axis as the result of magnetic attraction and repulsion.
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