Apparatus for increasing flux from an ampoule

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United States of America Patent

PATENT NO 11059061
APP PUB NO 20180250695A1
SERIAL NO

15910398

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Abstract

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Ampoules for a semiconductor manufacturing precursors and methods of use are described. The ampoules include a container with an inlet port and an outlet port. The inlet port has a showerhead that the end within the container. The showerhead has at least two angled nozzles to direct the flow of gas within the cavity so that the gas flow is not perpendicular to the surface of a liquid within the ampoule.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Mei Saratoga, US 279 30427
Choi, Kenric San Jose, US 23 1911
Yao, Daping San Jose, US 16 569
Yuan, Xiaoxiong San Jose, US 60 5463

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