OPTICAL PROCESSING DEVICE AND OPTICAL PROCESSING METHOD
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United States of America Patent
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Aug 30, 2018
app pub date -
Jan 18, 2016
filing date -
Feb 6, 2015
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Abstract
Disclosed herein is an optical processing device and an optical processing method. The optical processing device comprises: a light source unit configured to emit light; and a processing unit configured to expose an object to be processed to the light emitted from the light source unit. The processing unit includes: a processing region in which the object to be processed is held and exposed to the light in an atmosphere of a processing gas; and a preparatory region through which the processing gas passes, while being exposed to the light, to move toward the processing region, the preparatory region being configured to prevent the object to be processed from being arranged thereon.
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