Method and apparatus for substrate transfer and radical confinement

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10468282
APP PUB NO 20180247850A1
SERIAL NO

15963758

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Embodiments of the present invention provide an apparatus for transferring substrates and confining a processing environment in a chamber. One embodiment of the present invention provides a hoop assembly for using a processing chamber. The hoop assembly includes a confinement ring defining a confinement region therein, and three or more lifting fingers attached to the hoop. The three or more lifting fingers are configured to support a substrate outside the inner volume of the confinement ring.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Jared Ahmad Santa Clara, US 49 2386
Pal, Aniruddha Santa Clara, US 20 689
Reuter, Paul B Austin, US 57 1517
Salinas, Martin Jeff San Jose, US 25 1749
Yousif, Imad San Jose, US 53 2005

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