Embedded rotary micro pump, its method of integration and motion control
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United States of America Patent
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Jul 14, 2020
Grant Date -
Aug 23, 2018
app pub date -
Feb 20, 2018
filing date -
Feb 22, 2017
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Abstract
A micro pumping mechanism is proposed to generate flow in micro channels of micro fluidic devices and three dimensional microprocessors cooled by the flow of coolant fluids. The proposed micro pump comprises a rotating disk inside a chamber, which overlaps with the fluidic micro channel. The rotating disk induces a shear flow across the micro channel, transporting fluid elements in the direction of the rotation of the disk. The disk can be rotated by external magnetic or electric fields as in direct drive, induction, or electrostatic motors.
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