Method for manufacturing a membrane assembly
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United States of America Patent
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Jul 14, 2020
Grant Date -
Jul 19, 2018
app pub date -
Jul 4, 2016
filing date -
Jul 17, 2015
priority date (Note) -
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Abstract
A method for manufacturing a membrane assembly for EUV lithography, the method including: providing a stack having a planar substrate and at least one membrane layer, wherein the planar substrate includes an inner region and a border region around the inner region; and selectively removing the inner region of the planar substrate. The membrane assembly includes: a membrane formed from the at least one membrane layer; and a border holding the membrane, the border formed from the border region of the planar substrate. The stack is provided with a mechanical protection material configured to mechanically protect the border region during the selectively removing the inner region of the planar substrate.
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