Scanning probe microscopy system for mapping nanostructures on a surface of a sample and metrology frame therefore

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United States of America Patent

PATENT NO 10451650
APP PUB NO 20180203038A1
SERIAL NO

15744289

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Abstract

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A scanning probe microscopy system for mapping nanostructures on a surface of a sample, comprises a metrology frame, a sensor head including a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system comprises a clamp for clamping of the sample, which clamp is fixed to the metrology frame and arranged underneath the sensor head. The clamp is arranged for locally clamping of the sample in a clamping area underneath the probe tip, the clamping area being smaller than a size of the sample such as to clamp only a portion of the sample. Moreover, a metrology frame for use in scanning probe microscopy system as described includes a clamp for clamping of a sample, wherein the clamp is fixed to the metrology frame such as to be arranged underneath the sensor head.

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Patent Owner(s)

Patent OwnerAddress
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNOANNA VAN BUERENPLEIN 1 'S-GRAVENHAGE 2595 DA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Crowcombe, William Edward 's-Gravenhage, NL 9 6
Kuiper, Stefan 's-Gravenhage, NL 9 8

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