Tomography sample preparation systems and methods with improved speed, automation, and reliability
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United States of America Patent
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Jan 29, 2019
Grant Date -
May 24, 2018
app pub date -
Nov 2, 2017
filing date -
Nov 4, 2016
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Abstract
Sample pillars for x-ray tomography or other tomography scanning are created using an innovative milling strategy on a Plasma-FIB. The strategies are provided in methods, systems, and program products executable to perform the strategies herein. The milling strategy creates an asymmetrical crater around a sample pillar, and provides a single cut cut-free process. Various embodiments may include tuning the ion dose as a function of pixel coordinates along with optimization of the beam scan and crater geometries, drastically reducing the preparation time and significantly improving the overall workflow efficiency. A novel cut-free milling pattern is provided with a crescent shape and optimized dwell-time values.
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