Film bulk acoustic resonator oscillators and gas sensing systems using the same
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United States of America Patent
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Jun 16, 2020
Grant Date -
May 17, 2018
app pub date -
Oct 16, 2017
filing date -
Nov 16, 2016
priority date (Note) -
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Abstract
A resonator oscillator that may be included in a gas sensing system may include an oscillator that may be electrically connected to an external resonator through a conductive line. The oscillator may generate an oscillating signal having a frequency corresponding to a resonance frequency of the external resonator in an oscillating path. A spurious resonance removal circuit on the oscillating path may remove spurious resonance caused by the conductive line from the oscillating path. A gas sensing system may include the oscillator, a resonator that includes a sensor configured to sense a gas, and a frequency counting logic that receives the oscillating signal and a reference clock signal, performs a counting operation on the oscillating signal according to a logic state of the reference clock signal to generate a counted value, and generate a gas sensing output indicating a sensed gas based on the counted value.
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