Laser chamber with metal damper member
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 30, 2021
Grant Date -
May 17, 2018
app pub date -
Jan 8, 2018
filing date -
Aug 5, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A laser chamber may include a first discharge electrode, a second discharge electrode, a fan making a laser gas flow through a discharge space between the first and second discharge electrodes, a first insulating member disposed on upstream side and downstream side of the first discharge electrode in the laser gas flow, a first metal damper member disposed on upstream side of the second discharge electrode and a second insulating member disposed on downstream side of the second discharge electrode in the laser gas flow, and a second metal damper member disposed on downstream side of the second insulating member in the laser gas flow. In a boundary portion between the second metal damper member and the second insulating member, a first discharge space side surface of the second metal damper member may be located further toward the opposite side to the discharge space than a second discharge space side surface of the second insulating member. A first corner formed by the first surface and a first side surface of the second metal damper member, the first side surface being on the side of the second insulating member, may be in contact with a second side surface of the second insulating member, the second side surface being on the side of the second metal damper member.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2018 Application Filing Year
- H01L Class
- 30734 Applications Filed
- 24554 Patents Issued To-Date
- 79.90 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 4 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Sep 30, 2028 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Sep 30, 2032 |
