APPARATUS FOR PERFORMING SELENIZATION AND SULFURIZATION PROCESS ON GLASS SUBSTRATE

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United States of America Patent

SERIAL NO

15344374

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An apparatus for performing a selenization and sulfurization process on a glass substrate is introduced. A low-cost, non-toxic selenization and sulfurization process is performed on a large-area glass substrate in a normal-pressure environment with the apparatus to turn element selenium or sulfur into small molecules of high activity at high temperature by pyrolysis or by plasma, especially linear atmospheric pressure plasma. The process is finalized by dispersing the selenium or sulfur molecules uniformly and allowing the glass substrate to undergo reciprocating motion precisely, thereby achieving large-area, uniform selenization and sulfurization of the one-piece glass substrate.

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Patent OwnerAddress
NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGYNO 481 CHIA AN SEC CHUNG CHENG RD LONGTAN DIST TAOYUAN CITY 325

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CHEN, TSAN-TUNG TAOYUAN CITY, TW 5 2
LI, JEN-CHIEH TAOYUAN CITY, TW 12 9
LIN, MING-JUNE TAOYUAN CITY, TW 7 4
PAN, WEN-CHUEH TAOYUAN CITY, TW 13 10
WANG, YIH-HSING TAOYUAN CITY, TW 5 5
WEI, SHIH-SHAN TAOYUAN CITY, TW 6 5
WU, TIEN-FU TAOYUAN CITY, TW 4 1

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