Manufacturing Of Multi-Degree-Of-Freedom Precise Stage Comprising Multi-Materials And Using Three-Dimensional Printer
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Jun 23, 2015
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Apr 24, 2015
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Disclosed is a multi-degree-of-freedom precise stage comprising multi-materials and using a three-dimensional printer. A multi-degree-of-freedom precise stage device comprises: a flexure hinge provided as a coupling element between an outer frame and a stage moving part; and a plurality of piezoelectric actuators provided at the outer frame so as to move a stage by the degrees of movement-freedom in multiple directions, and the stage, which has a monolithic structure, is manufactured from at least two materials having different material properties by using the three-dimensional printer.
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