Fabrication of a multi-layered magnetic element
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United States of America Patent
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Feb 19, 2019
Grant Date -
Apr 5, 2018
app pub date -
Nov 21, 2017
filing date -
Jan 22, 2016
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Abstract
A fabrication method that includes cryogenically cooling a multi-layered structure, which includes a barrier layer, in a multi-purpose chamber having a single enclosure around at least one sputtering target and a substrate support. The method also includes depositing a ferromagnetic layer over the barrier layer of the cryogenically cooled multi-layered structure in the single enclosure when the multi-layered structure is supported on the substrate support.
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