Drive apparatus comprising mechanical vibration suppression function, and system comprising mechanical vibration suppression function
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United States of America Patent
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Jan 1, 2019
Grant Date -
Mar 29, 2018
app pub date -
Sep 21, 2017
filing date -
Sep 26, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
An apparatus or system comprises: a damper side linear motor; a drive side linear motor; a first detection unit that detects a first position that is a position of a movable portion of the drive side linear motor in relation to a machine base; a second detection unit that detects a second position that is a position of a movable portion of the damper side linear motor in relation to the machine base; a third detection unit that detects a third position that is a position of the movable portion of the drive side linear motor in relation to the movable portion of the damper side linear motor; a drive side control unit that controls the drive side linear motor, based on the first position and the third position; and a damper side control unit that controls the damper side linear motor, based on the second position.
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