Cleaning apparatus
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United States of America Patent
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May 12, 2020
Grant Date -
Mar 29, 2018
app pub date -
Jul 29, 2015
filing date -
Jul 31, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
The problem to be addressed by the present invention is to provide a cleaning apparatus capable of obtaining a cleaning liquid having a high degree of cleanliness. A cleaning apparatus 10 includes a dissolution tank 20 for dissolving a gas in a liquid, a transfer pump 30 for sending the liquid together with the gas into the dissolution tank 20, and a feed nozzle 40 for feeding the liquid stored in the dissolution tank 20 to a workpiece W. The transfer pump 30 is a positive displacement pump. Portions of the dissolution tank 20, the transfer pump 30, and the feed nozzle 40 that come into contact with the liquid are made of a fluororesin.
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