Holding apparatus
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United States of America Patent
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-
Nov 17, 2020
Grant Date -
Mar 15, 2018
app pub date -
Sep 6, 2017
filing date -
Sep 12, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
A ceramic heater includes a plate-shaped base with an upper surface and a lower surface, a tubular shaft with an upper end surface connected to the lower surface of the base and a lower end surface, resistive heating elements embedded in the base, a first hole extending in the base along the upper surface of the base, and a second hole extending from the lower end surface or an inner surface of the shaft toward the upper end surface. A third hole connecting the first hole and the second hole to each other is formed continuously between the base and the shaft, and a depth of the third hole from an imaginary plane that passes through a boundary between the second hole and the third hole and that is along the upper surface of the base gradually increases in the direction to the outer edge.
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