Light-irradiation thermal treatment apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 16, 2021
Grant Date -
Mar 15, 2018
app pub date -
Jul 13, 2017
filing date -
Sep 14, 2016
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A ring support is attached to an inner wall surface of a chamber that houses a semiconductor wafer to support a susceptor. When the semiconductor wafer is placed on the susceptor, an inner space of the chamber is separated into an upper space and a lower space. Particles are likely to accumulate on a lower chamber window as a floor part of the chamber. However, since the upper space and the lower space are separated, the semiconductor wafer can be prevented from being contaminated by the particles flowing into the upper space and adhering to a surface of the semiconductor wafer even when the particles on the lower chamber window are blown up by irradiation with flash light.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2017 Application Filing Year
- H01L Class
- 30754 Applications Filed
- 25260 Patents Issued To-Date
- 82.14 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- H01L Class
- 52.76 % this patent is cited more than
- 4 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Sep 16, 2028 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Sep 16, 2032 |
