CONTACT SURFACE FOR MEMS DEVICE
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United States of America Patent
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Sep 8, 2017
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Sep 12, 2016
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Abstract
Systems and methods for forming an electrostatic MEMS switch that is used to hot switch a source of current or voltage. At least one surface of the MEMS switch is treated with an ion milling machine to reduce surface roughness to less than about 10 nm rms.
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