Manufacturing method for electrostatically tunable magnetoelectric inductors with large inductance tunability
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United States of America Patent
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May 26, 2020
Grant Date -
Mar 15, 2018
app pub date -
May 24, 2017
filing date -
Aug 18, 2011
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Abstract
A method of manufacturing an electrostatically tunable magnetoelectric inductor, the method includes forming a piezoelectric layer on a substrate. The method further includes forming a magnetoelectric structure over the piezoelectric layer by: forming a first electrically conductive layer disposed above the piezoelectric layer; forming an isolation layer configured to translate changes in strain; forming a magnetic film layer disposed over the isolation layer; and forming a second electrically conductive layer, disposed over the magnetic film layer and wherein the second electrically conductive layer is in electrical communication with the first electrically conductive layer so as to form at least one electrically conductive coil around the magnetic film layer.
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