Imaging optical unit and projection exposure unit including same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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May 19, 2020
Grant Date -
Mar 15, 2018
app pub date -
Oct 10, 2017
filing date -
Apr 14, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
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US Family Size
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Non-US Coverage
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Abstract
An imaging optical unit for projection lithography has a plurality of mirrors for guiding imaging light from an object field into an image field. The object field is spanned by two object field coordinates, with a normal coordinate being perpendicular thereto. Imaging light propagates in a first imaging light plane through at least one first plane intermediate image of the imaging optical unit. In a second imaging light plane, the imaging light propagates through at least one second plane intermediate image of the imaging optical unit. The number of first plane intermediate images and the number of second plane intermediate images differ from one another. An imaging optical unit with reduced production costs emerges.
First Claim
Other Claims data not available
Family
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| DE | A1 | DE102015226531 | Dec 22, 2015 |
| WO | A1 | WO2016166080 | Apr 12, 2016 |
| CN | B | CN107810446 | Apr 12, 2016 |
| CN | B | CN113703286 | Apr 12, 2016 |
| KR | B1 | KR102648040 | Apr 12, 2016 |
| JP | B2 | JP6799544 | Apr 12, 2016 |
| KR | A | KR20240036129 | Apr 12, 2016 |
International Classification(s)
- 2017 Application Filing Year
- G02B Class
- 11360 Applications Filed
- 8685 Patents Issued To-Date
- 76.46 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- G02B Class
- 43.63 % this patent is cited more than
- 5 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Nov 19, 2027 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Nov 19, 2031 |
