HUMIDITY SENSOR WITH HEAT MODULE
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United States of America Patent
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Feb 24, 2016
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Feb 27, 2015
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Abstract
A humidity sensor is provided, including a silicon base plate on which several intermetallic dielectric layers, each of which is provided with a metallic zone, and a metal layer are disposed, wherein the metal layer is etched to form two electrodes, each including an armature provided with a plurality of arms, wherein each armature is mounted so that the arms are interlaced to have arms positioned to face one another. The sensor also includes a temperature module or a heating module.
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