Substrate processing method and substrate processing device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10668497
APP PUB NO 20180071772A1
SERIAL NO

15559076

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

In order to solve the problem of satisfactorily removing a resist from the surface of a substrate, the present invention is a substrate processing device (1) having a spin chuck (5) and an SPM feed unit (6) for feeding SPM to the substrate (W) held by the spin chuck (5), wherein the SPM feed unit (6) includes a mixing unit (30) for mixing an aqueous hydrogen peroxide solution and hydrofluoric acid and producing a liquid mixture of hydrogen peroxide water and hydrofluoric acid, and an HF-mixed SPM production unit (14) for mixing the liquid mixture and sulfuric acid and producing HF-mixed SPM.

First Claim

See full text

Other Claims data not available

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
SCREEN HOLDINGS CO LTDJAPAN KYOTO KYOTO HORIKAWADORI BEIJING AREA WITHIN THE TEMPLE 4 CHOME GOD KITAMACHI 1 GA 1 KYOTO-SHI KYOTO

International Classification(s)

loading....
  • 2016 Application Filing Year
  • C09K Class
  • 3076 Applications Filed
  • 2094 Patents Issued To-Date
  • 68.08 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20162017201820192020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akizuki, Yusuke Kyoto, JP 5 3

Cited Art Landscape

Load Citation

Patent Citation Ranking

  • 1 Citation Count
  • C09K Class
  • 50.14 % this patent is cited more than
  • 5 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges706659319301 - 1011 - 2021 - 3031 - 40050100150200250300350400450500550600650700750

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Dec 2, 2027
11.5 Year Payment $7400.00 $3700.00 $1850.00 Dec 2, 2031